Compact 6-axis Manipulator USM Series


Ultra-Compact 6-Axis Manipulator USM-R1C-010

The new KOHZU 6-Axis Manipulator is a culminationof our extensive expertise in production and analysis equipment.

◦Size and weight have been reduced while maintaining high accuracy and rigidity!
◦High precision ball screw drives for all axes ensure a long performance life!

1. Centralized Connector Unit

The 6-axis motor and sensor wiring are concentrated in one location to make even complicated multi-axis wiring work easy (can also be removed if not needed).


2. Compact and Lightweight

Lightweight design (approx.3kg) enables installation on highspeed carrier shafts.


3. High Tracking

Positioning i s completed according to highly accurate commands thanks to tracking in sub-micron units for straight lines or within seconds for angles.
Example: The graph below shows tracking data for one pulse of the swivel stage. Error is within ±0.0002 degrees for 0.000797 degrees.



Axis Motion Range Max Speed Minimum Resoluton Micro-Step(div)
X ±3mm 10mm/sec 0.1μm 1/20
Y ±3mm 10mm/sec 0.1μm 1/20
Z ±1.5mm 2.5mm/sec 0.025μm 1/20
θ ±3° 12.7°/sec 0.000127° 1/20
α ±3° 9.6°/sec 0.0000637° 1/20
β ±3° 12°/sec 0.0000797° 1/20

※Minimum resolution can be changed according to the number of driver divisions.

Dimension (Click enlarge the picture)



(Click enlarge the PDF)