Compact 6-axis Manipulator USM Series
Ultra-Compact 6-Axis Manipulator USM-R1C-010
The new KOHZU 6-Axis Manipulator is a culminationof our extensive expertise in production and analysis equipment.
◦Size and weight have been reduced while maintaining high accuracy and rigidity!
◦High precision ball screw drives for all axes ensure a long performance life!
1. Centralized Connector Unit
The 6-axis motor and sensor wiring are concentrated in one location to make even complicated multi-axis wiring work easy (can also be removed if not needed).
2. Compact and Lightweight
Lightweight design (approx.3kg) enables installation on highspeed carrier shafts.
3. High Tracking
Positioning i s completed according to highly accurate commands thanks to tracking in sub-micron units for straight lines or within
seconds for angles.
Example: The graph below shows tracking data for one pulse of the swivel stage. Error is within ±0.0002 degrees for 0.000797 degrees.
|Axis||Motion Range||Max Speed||Minimum Resoluton||Micro-Step(div)|
※Minimum resolution can be changed according to the number of driver divisions.
Dimension (Click enlarge the picture)
(Click enlarge the PDF)
- High Resolution Goniometer
- Attachment for Diffractometer
- Optical Table
- Mirror/Crystal alignment
- Micro Goniometer
- Delay line