CT

       ** X-ray Computed Tomography (XCT-Series)

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Microbeam System

< HSM-15>

The instrument shown on the left enables X-rays to be focused to submicron size through a Fresnel zone-plate. A beam like the tip of a needle is used for research on X-ray diffraction measurements and fluorescent X-ray analysis in a very small area. The Fresnel zone-plate condenser and the sample observing microscope can be toggled with the touch of a single button. Also to observe very small samples, the rotation center displacement of the rotation stage is kept at 1 μm or less. This instrument is now in service at the SPring-8 (Super Photon ring-8 GeV) BL24XU in Japan. -

High Precision Rotation Stage

<SPU-1A>

This device is primarily used for X-ray CT.Therefore, we have an eccentricity less than 1μm.



High Precision Rotation Stage

<SPU-1C>

This device is primarily used for X-ray CT.Therefore, we have the following rotation accuracy 1μm.



High Precision Rotation Stage

<SPU-1>

This stage is used for X-ray laminography. Which is inclined X-ray CT. The eccentricity keeps to be less than 1μm even in the inclined geometry.



High Speed / Precision Spinner

<EM200-11>

It is developed as a high speed spinner having within 1 micron eccentricity. It is useful not only for putting a sample, but also putting an optical component.



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